- Innovation and Challenges
SAPM
- When constructing a vacuum line in the semiconductor factory, SAPM(Sleeve Accident Prevention Module) can be installed on the connecting pipes between floors.
Using SAPM, the construction period will be reduced, and the installation of lap joint on the connecting part is not necessary. Also, SAPM will prevent the risk of water leak, fire, and other safety accidents.
- pipe module installed
- cover installed when removing pipes
SPEC
| LIST | MATERIAL | SIZE (PIPE) |
|---|---|---|
| 1. Base Plate | STS304 | 100A~300A |
| 2. Pipe Module | STS304 | 100A~300A |
| 3. Cover | STS304 | 100A~300A |